Ceramic Products - 企業ランキング(全13社)
更新日： 集計期間:Aug 13, 2025〜Sep 09, 2025
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企業情報を表示
| 会社名 | 代表製品 | ||
|---|---|---|---|
| 製品画像・製品名・価格帯 | 概要 | 用途/実績例 | |
| 【Features】 ○ Zero thermal expansion type ESC ・High precision flatness <100nm (8 inches) ・Compatible with pore-free processing ・High specific rigidity ・Non-magnetic ○ Built-in Heater type ESC ・Johnsen-Rahbeck type ・Compatible with 8 and 12 inches ・Electrode pattern can be selected as single pole or double pole ・Excellent in-plane temperature uniformity due to built-in planar heating element ○ Spray coat type ESC ・Low impedance Realization of high thermal transfer (heat passage) module ・Realization of large size using MMC substrate Reliable electrostatic chucks can be manufactured by thermal expansion matching with thermal spray coatings ● For more details, please contact us or refer to the catalog. | - Plasma environment heater-integrated electrostatic chuck - Non-magnetic electrostatic chuck for electron beam environments - Ceramic-coated electrostatic chuck for large special glass substrates | ||
| 【Features】 ○ Low thermal expansion ○ High rigidity ○ Non-magnetic ○ Suitable for semiconductor manufacturing equipment (wafer exposure, reticle drawing, etc.) that requires nano-level control instead of recrystallized glass. ● For more details, please contact us or refer to the catalog. | - Various laser interference reflective mirrors - Electrostatic chuck - XY stage configuration table | ||
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NTKセラテック
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- 代表製品
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Ceramic products ESC (Electrostatic Chuck)
- 概要
- 【Features】 ○ Zero thermal expansion type ESC ・High precision flatness <100nm (8 inches) ・Compatible with pore-free processing ・High specific rigidity ・Non-magnetic ○ Built-in Heater type ESC ・Johnsen-Rahbeck type ・Compatible with 8 and 12 inches ・Electrode pattern can be selected as single pole or double pole ・Excellent in-plane temperature uniformity due to built-in planar heating element ○ Spray coat type ESC ・Low impedance Realization of high thermal transfer (heat passage) module ・Realization of large size using MMC substrate Reliable electrostatic chucks can be manufactured by thermal expansion matching with thermal spray coatings ● For more details, please contact us or refer to the catalog.
- 用途/実績例
- - Plasma environment heater-integrated electrostatic chuck - Non-magnetic electrostatic chuck for electron beam environments - Ceramic-coated electrostatic chuck for large special glass substrates
Ceramic products ZPF (Zero Expansion Ceramics)
- 概要
- 【Features】 ○ Low thermal expansion ○ High rigidity ○ Non-magnetic ○ Suitable for semiconductor manufacturing equipment (wafer exposure, reticle drawing, etc.) that requires nano-level control instead of recrystallized glass. ● For more details, please contact us or refer to the catalog.
- 用途/実績例
- - Various laser interference reflective mirrors - Electrostatic chuck - XY stage configuration table
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NTKセラテック
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